Oct 19, 2019  
2013-2014 Graduate Catalog 
    
2013-2014 Graduate Catalog [NOTE!!!! THIS IS AN ARCHIVED CATALOG. FOR THE CURRENT CATALOG, GO TO CATALOG.NIU.EDU]

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ELE 538 - Thin Film Engineering


Lecture/laboratory course designed to demonstrate theory and principles of thin film processing including vacuum processing and deposition techniques. Topics include resistive evaporation, DC sputtering, RF sputtering, ion beam sputtering, electron beam evaporation, methods of achieving vacuum, and measurement techniques.

Prerequisites & Notes
PRQ: ELE 335 or consent of department.

Credits: 3



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