Feb 19, 2020  
2019-2020 Undergraduate Catalog 
    
2019-2020 Undergraduate Catalog
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ELE 438 - Thin Film Engineering


Lecture/laboratory course designed to demonstrate theory and principles of thin film processing including vacuum processing and deposition techniques. Topics include resistive evaporation, DC sputtering, RF sputtering, ion beam sputtering, electron beam evaporation, methods of achieving vacuum, and measurement techniques.

Prerequisites & Notes
PRQ: ELE 335.

Credits: 3



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