Oct 06, 2022  
2022-2023 Undergraduate Catalog 
2022-2023 Undergraduate Catalog

ELE 438 - Thin Film Engineering

Lecture/laboratory course designed to demonstrate theory and principles of thin film processing including vacuum processing and deposition techniques. Topics include resistive evaporation, DC sputtering, RF sputtering, ion beam sputtering, electron beam evaporation, methods of achieving vacuum, and measurement techniques.

Prerequisites & Notes
PRQ: ELE 335.

Credits: 3