Jul 13, 2024  
2024-2025 Undergraduate Catalog 
    
2024-2025 Undergraduate Catalog

ELE 438 - Thin Film Engineering


Lecture/laboratory course designed to demonstrate theory and principles of thin film processing including vacuum processing and deposition techniques. Topics include resistive evaporation, DC sputtering, RF sputtering, ion beam sputtering, electron beam evaporation, methods of achieving vacuum, and measurement techniques.

Prerequisites & Notes
PRQ: ELE 335.

Credits: 3