Jun 12, 2021  
2021-2022 Undergraduate Catalog 
    
2021-2022 Undergraduate Catalog

ELE 438 - Thin Film Engineering


Lecture/laboratory course designed to demonstrate theory and principles of thin film processing including vacuum processing and deposition techniques. Topics include resistive evaporation, DC sputtering, RF sputtering, ion beam sputtering, electron beam evaporation, methods of achieving vacuum, and measurement techniques.

Prerequisites & Notes
PRQ: ELE 335.

Credits: 3